Selected Publications

Articles In Academic Journals

Year Title
2003 A Design Methodology for a Bulk-Micromachined Two-Dimensional Electrostatic Torsion MicromirrorJournal of Microelectromechanical Systems. 692-701.
2002 Modeling Air Damping Effect in a Bulk-Micromachined 2D Tilt MirrorSensors and Actuators A. 42-48.

Conference Papers

Year Title
2003 A Single Two-Axis Micromachined Tilt Mirror and Linear Array.  83-94.