|2009|| Synthesis of Tube-in-Tube Nanostructures of Metal Oxides by Template Replication.
|2008|| Nanoindentation investigation of HfO2 and Al2O3 films grown by atomic layer deposition.
Journal of Electrochemical Society.
|2009|| Physical Characterization of Zinc Oxide Thin Films Grown by ALD.
|2008|| Effect of Wafer Bonding and Layer splitting on Nanomechanical Properties of Standard and Strained SOI Films.
|2008|| Weakening of Hardness and Modulus of the Si Lattice by Hydrogen Implantation for Layer Transfer in Wafer Bonding Technology.
|2007|| Nanomechanical Properties of High-k Dielectrics Grown by Atomic Layer Deposition.