Selected Publications

Articles In Academic Journals

Year Title
2005 EUV emission from xenon in the 10–80 nm wavelength range using a compact ECR ion sourceNuclear Instruments and Methods in Physics Research B. 23-29.

Conference Papers

Year Title
2005 Characterization of extreme ultraviolet (EUV) emission from xenon generated using a compact plasma-discharge source for lithography applications.  59180E.