Articles In Academic Journals

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Year	Title
2009	Nanomechanical Response of the Si Lattice to Hydrogen Implantation and Annealing for Layer Splitting.  Japanese Journal of Applied Physics. 101202.
2008	Nanoindentation Investigation of HfO2 and Al2O3 Films Grown by Atomic Layer Deposition.  J. Electrochem. Soc.. H545-H551.
2007	Nanomechanical Properties of Strained Silicon-on-Insulator (sSOI) Films Epitaxially grown on Si1-xGex and Layer Transferred by Wafer Bonding.  Mater. Res. Soc. Symp. Proc..

Conference Papers

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Year	Title
2009	Physical Characterization of Zinc Oxide Thin Films Grown by ALD.  85.