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K. Tapily
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K. Tapily
Publications
Publications
Selected Publications
Articles In Academic Journals
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Year
Title
2009
Nanomechanical Response of the Si Lattice to Hydrogen Implantation and Annealing for Layer Splitting
.
Japanese Journal of Applied Physics
. 101202.
2008
Nanoindentation Investigation of HfO2 and Al2O3 Films Grown by Atomic Layer Deposition
.
J. Electrochem. Soc.
. H545-H551.
2007
Nanomechanical Properties of Strained Silicon-on-Insulator (sSOI) Films Epitaxially grown on Si1-xGex and Layer Transferred by Wafer Bonding
.
Mater. Res. Soc. Symp. Proc.
.
Conference Papers
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Year
Title
2009
Physical Characterization of Zinc Oxide Thin Films Grown by ALD
. 85.