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K. Tapily

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K. Tapily

  • Publications

Publications

Selected Publications

Articles In Academic Journals

Year Title
2009 Nanomechanical Response of the Si Lattice to Hydrogen Implantation and Annealing for Layer Splitting.  Japanese Journal of Applied Physics. 101202.
2008 Nanoindentation Investigation of HfO2 and Al2O3 Films Grown by Atomic Layer Deposition.  J. Electrochem. Soc.. H545-H551.
2007 Nanomechanical Properties of Strained Silicon-on-Insulator (sSOI) Films Epitaxially grown on Si1-xGex and Layer Transferred by Wafer Bonding.  Mater. Res. Soc. Symp. Proc..

Conference Papers

Year Title
2009 Physical Characterization of Zinc Oxide Thin Films Grown by ALD.  85.
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