Selected Publications

Articles In Academic Journals

Year Title
2011 Mechanical and Structural Characterization of ALD Zinc Oxide FilmsSemiconductor Science and Technology. 1-7.
2011 Nanomechanical Study of Amorphous and Polycrystalline ALD HfO2 Thin FilmsInternational Journal of Surface Science and Engineering. 193-204.
2007 Nanomechanical Properties of High-k Dielectrics Grown by Atomic Layer DepositionECS Transactions. 123-130.

Conference Papers

Year Title
2010 Electrical Characterization of ALD ZnO and HfO2 Thin Films.  281.
2010 Growth Mechanism of ALD ZnO Films Investigated by Physical Characterization.  355.
2010 Hydrogen Ion-Induced AlN Thin Layer Transfer: An Elastomechanical Study.  37.
2010 Investigation of Thermal Evolution of Implanted Hydrogen in GaN by Nanoindentation.  241.
2010 Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition.  117.
2010 Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures.  203.
2009 Physical Characterization of Thin Films Zinc Oxide Grown by ALD.  85-92.
2008 Comparison of Nanomechanical Behavior of the Amorphous and Crystalline Phases of ALD HfO2.  269.
2008 Effect of Wafer Bonding and Layer Splitting on Nanomechanical Properties of standard and strained SOI Films.  337.
2008 Electrical Properties of high-k ALD HfO2 deposited on strained Si Layers Epitaxially Grown on Si0.8Ge0.2/ Si Substrates.  159.