|2011|| Mechanical and Structural Characterization of ALD Zinc Oxide Films.
Semiconductor Science and Technology.
|2011|| Nanomechanical Study of Amorphous and Polycrystalline ALD HfO2 Thin Films.
International Journal of Surface Science and Engineering.
|2007|| Nanomechanical Properties of High-k Dielectrics Grown by Atomic Layer Deposition.
|2010|| Electrical Characterization of ALD ZnO and HfO2 Thin Films.
|2010|| Growth Mechanism of ALD ZnO Films Investigated by Physical Characterization.
|2010|| Hydrogen Ion-Induced AlN Thin Layer Transfer: An Elastomechanical Study.
|2010|| Investigation of Thermal Evolution of Implanted Hydrogen in GaN by Nanoindentation.
|2010|| Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition.
|2010|| Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures.
|2009|| Physical Characterization of Thin Films Zinc Oxide Grown by ALD.
|2008|| Comparison of Nanomechanical Behavior of the Amorphous and Crystalline Phases of ALD HfO2.
|2008|| Effect of Wafer Bonding and Layer Splitting on Nanomechanical Properties of standard and strained SOI Films.
|2008|| Electrical Properties of high-k ALD HfO2 deposited on strained Si Layers Epitaxially Grown on Si0.8Ge0.2/ Si Substrates.