Selected Publications

Articles In Academic Journals

Year Title
2011 Mechanical and Structural Characterization of ALD Zinc Oxide FilmsSemiconductor Science and Technology. 1-7.
2011 Nanomechanical Study of Amorphous and Polycrystalline ALD HfO2 Thin FilmsInternational Journal of Surface Science and Engineering. 193-204.
2010 A Low Voltage Nano-Porous Electroosmotic PumpJ. Colloid and Interface Science. 465.
2010 Synthesis of Nested Coaxial Multiple Walled Nanotubes by Atomic Layer DepositionACS Nano. 753-758.
2009 Atomic layer deposition of ZrO2 and HfO2 nanotubes by template replicationElectrochemical and Solid-State Letters. K25-K28.
2009 Silicon Nanowire Non-Volatile Memory with High-k Gate Dielectric StackMicroelectron. Eng.. 1957.
2007 Nanomechanical Properties of High-k Dielectrics Grown by Atomic Layer DepositionECS Transactions. 123-130.

Conference Papers

Year Title
2010 Electrical Characterization of ALD ZnO and HfO2 Thin Films.  281.
2010 Electrophoretic Light Scattering for Surface Zeta Potential Measurement of ALD Metal Oxide Films.  37.
2010 Finite Element Modeling and Raman Study of Strain Distribution in Patterned Device Islands on Strained Silicon-on-Insulator (sSOI) Substrates.  529.
2010 Growth Mechanism of ALD ZnO Films Investigated by Physical Characterization.  355.
2010 Hydrogen Ion-Induced AlN Thin Layer Transfer: An Elastomechanical Study.  37.
2010 Investigation of Thermal Evolution of Implanted Hydrogen in GaN by Nanoindentation.  241.
2010 RF and Structural Characterization of SRF thin Films
2010 Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition.  117.
2010 Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures.  203.
2009 ALD Synthesis of Tube-in-Tube Nanostructures of Transition Metal Oxides by Template Replication.  191-198.
2009 Application of ALD high-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories.  473.
2009 C-V and Deep Level Transient Spectroscopy (DLTS) of ALD HfO2 on s-Si/SiGe/Si: Effects of strained-Si Thickness and Surface Nitridation.  379.
2009 Modeling and Characterization of ALD grown ZnO Nanotubes and their Integration into Sub-Micron Devices.  93.
2009 Optimizing the Release of ALD Grown ZnO Nanotubes from Anodic Aluminum Oxide Templates.  191-198.
2009 Physical Characterization of Thin Films Zinc Oxide Grown by ALD.  85-92.
2009 RF and Structural Characterization of SRF Films.  431.
2009 Self-organized Crystal Growth of Nanostructured ZnO Morphologies by Hydrothermal Synthesis.  3.
2009 TEM Study of Niobium Surfaces Treated by Different Polishing Techniques.  300.
2008 Comparison of Nanomechanical Behavior of the Amorphous and Crystalline Phases of ALD HfO2.  269.
2008 Effect of Wafer Bonding and Layer Splitting on Nanomechanical Properties of standard and strained SOI Films.  337.
2008 Electrical Properties of high-k ALD HfO2 deposited on strained Si Layers Epitaxially Grown on Si0.8Ge0.2/ Si Substrates.  159.
2008 Strain Relaxation in Patterned Strained Silicon-on-Insulator (sSOI) by Raman Spectroscopy.  329.
2008 Weakening of Hardness and Modulus of the Si Lattice by Hydrogen Implantation for Layer Transfer in Wafer Bonding Technology.  385.