Articles In Academic Journals

Filter

Year	Title
2011	Mechanical and Structural Characterization of ALD Zinc Oxide Films.  Semiconductor Science and Technology. 1-7.
2011	Nanomechanical Study of Amorphous and Polycrystalline ALD HfO2 Thin Films.  International Journal of Surface Science and Engineering. 193-204.
2010	A Low Voltage Nano-Porous Electroosmotic Pump.  J. Colloid and Interface Science. 465.
2010	Synthesis of Nested Coaxial Multiple Walled Nanotubes by Atomic Layer Deposition.  ACS Nano. 753-758.
2009	Atomic layer deposition of ZrO2 and HfO2 nanotubes by template replication.  Electrochemical and Solid-State Letters. K25-K28.
2009	Silicon Nanowire Non-Volatile Memory with High-k Gate Dielectric Stack.  Microelectron. Eng.. 1957.
2007	Nanomechanical Properties of High-k Dielectrics Grown by Atomic Layer Deposition.  ECS Transactions. 123-130.

Conference Papers

Filter

Year	Title
2010	Electrical Characterization of ALD ZnO and HfO2 Thin Films.  281.
2010	Electrophoretic Light Scattering for Surface Zeta Potential Measurement of ALD Metal Oxide Films.  37.
2010	Finite Element Modeling and Raman Study of Strain Distribution in Patterned Device Islands on Strained Silicon-on-Insulator (sSOI) Substrates.  529.
2010	Growth Mechanism of ALD ZnO Films Investigated by Physical Characterization.  355.
2010	Hydrogen Ion-Induced AlN Thin Layer Transfer: An Elastomechanical Study.  37.
2010	Investigation of Thermal Evolution of Implanted Hydrogen in GaN by Nanoindentation.  241.
2010	RF and Structural Characterization of SRF thin Films
2010	Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition.  117.
2010	Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures.  203.
2009	ALD Synthesis of Tube-in-Tube Nanostructures of Transition Metal Oxides by Template Replication.  191-198.
2009	Application of ALD high-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories.  473.
2009	C-V and Deep Level Transient Spectroscopy (DLTS) of ALD HfO2 on s-Si/SiGe/Si: Effects of strained-Si Thickness and Surface Nitridation.  379.
2009	Modeling and Characterization of ALD grown ZnO Nanotubes and their Integration into Sub-Micron Devices.  93.
2009	Optimizing the Release of ALD Grown ZnO Nanotubes from Anodic Aluminum Oxide Templates.  191-198.
2009	Physical Characterization of Thin Films Zinc Oxide Grown by ALD.  85-92.
2009	RF and Structural Characterization of SRF Films.  431.
2009	Self-organized Crystal Growth of Nanostructured ZnO Morphologies by Hydrothermal Synthesis.  3.
2009	TEM Study of Niobium Surfaces Treated by Different Polishing Techniques.  300.
2008	Comparison of Nanomechanical Behavior of the Amorphous and Crystalline Phases of ALD HfO2.  269.
2008	Effect of Wafer Bonding and Layer Splitting on Nanomechanical Properties of standard and strained SOI Films.  337.
2008	Electrical Properties of high-k ALD HfO2 deposited on strained Si Layers Epitaxially Grown on Si0.8Ge0.2/ Si Substrates.  159.
2008	Strain Relaxation in Patterned Strained Silicon-on-Insulator (sSOI) by Raman Spectroscopy.  329.
2008	Weakening of Hardness and Modulus of the Si Lattice by Hydrogen Implantation for Layer Transfer in Wafer Bonding Technology.  385.