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J. Yan
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J. Yan
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Articles In Academic Journals
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Year
Title
2002
121.6 nm radiation Source for Advanced Lithography
.
J. Vac. Sci. Technol. B.
. 2574-2577.
2002
VUV Emission from a Novel DBD-Based Radiation Source
.
J. Appl. Phys. D: Appl. Phys.
. 109-114.