Selected Publications

Articles In Academic Journals

Year Title
2011 Mechanical and Structural Characterization of ALD Zinc Oxide FilmsSemiconductor Science and Technology. 1-7.
2011 Nanomechanical Study of Amorphous and Polycrystalline ALD HfO2 Thin FilmsInternational Journal of Surface Science and Engineering. 193-204.

Conference Papers

Year Title
2010 Electrophoretic Light Scattering for Surface Zeta Potential Measurement of ALD Metal Oxide Films,” Atomic Layer Deposition Applications 6