C-V and Deep Level Transient Spectroscopy (DLTS) of ALD HfO2 on s-Si/SiGe/Si: Effects of strained-Si Thickness and Surface Nitridation

Conference Papers

Publication Date

  • 2009
  • Presented At Event

  • ECS Transactions  Conference
  • Start Page

  • 379
  • Volume

  • 25
  • Issue

  • 6