Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures

Conference Papers

Publication Date

  • 2010
  • Presented At Event

  • ECS Transactions  Conference
  • Start Page

  • 203
  • Volume

  • 33
  • Issue

  • 2