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Electrophoretic Light Scattering for Surface Zeta Potential Measurement of ALD Metal Oxide Films,” Atomic Layer Deposition Applications 6
Conference Papers
Overview
Additional Document Info
Overview
Authors
A. Beskok
Gu
H Baumgart
Oktay Baysal Ph.D, P.E., F.ASME
S Qian
S Yalcin
Publication Date
2010
Presented At Event
Electro Chemical Society Transactions
Conference
Additional Document Info
Volume
Volume 33
