ECS Transactions


Related Documents

  • ALD Synthesis of Tube-in-Tube Nanostructures of Transition Metal Oxides by Template Replication  Conference Papers
  • Application of ALD high-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories  Conference Papers
  • C-V and Deep Level Transient Spectroscopy (DLTS) of ALD HfO2 on s-Si/SiGe/Si: Effects of strained-Si Thickness and Surface Nitridation  Conference Papers
  • Comparison of Nanomechanical Behavior of the Amorphous and Crystalline Phases of ALD HfO2  Conference Papers
  • Effect of Wafer Bonding and Layer Splitting on Nanomechanical Properties of standard and strained SOI Films  Conference Papers
  • Electrical Characterization of ALD ZnO and HfO2 Thin Films  Conference Papers
  • Electrical Properties of high-k ALD HfO2 deposited on strained Si Layers Epitaxially Grown on Si0.8Ge0.2/ Si Substrates  Conference Papers
  • Electrophoretic Light Scattering for Surface Zeta Potential Measurement of ALD Metal Oxide Films  Conference Papers
  • Finite Element Modeling and Raman Study of Strain Distribution in Patterned Device Islands on Strained Silicon-on-Insulator (sSOI) Substrates  Conference Papers
  • Growth Mechanism of ALD ZnO Films Investigated by Physical Characterization  Conference Papers
  • Hydrogen Ion-Induced AlN Thin Layer Transfer: An Elastomechanical Study  Conference Papers
  • Investigation of Thermal Evolution of Implanted Hydrogen in GaN by Nanoindentation  Conference Papers
  • Modeling and Characterization of ALD grown ZnO Nanotubes and their Integration into Sub-Micron Devices  Conference Papers
  • Optimizing the Release of ALD Grown ZnO Nanotubes from Anodic Aluminum Oxide Templates  Conference Papers
  • Physical Characterization of Thin Films Zinc Oxide Grown by ALD  Conference Papers
  • Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition  Conference Papers
  • Self-organized Crystal Growth of Nanostructured ZnO Morphologies by Hydrothermal Synthesis  Conference Papers
  • Strain Relaxation in Patterned Strained Silicon-on-Insulator (sSOI) by Raman Spectroscopy  Conference Papers
  • Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures  Conference Papers
  • Weakening of Hardness and Modulus of the Si Lattice by Hydrogen Implantation for Layer Transfer in Wafer Bonding Technology  Conference Papers